项目 |
指标纯度% |
||||
高纯氩气(Ar) |
99.999 |
99.9995 |
99.9997 |
超纯氩 99.9999 |
|
杂质含量(ppm) |
氮(N2) |
≤5 |
≤5 |
≤3 |
≤0.4 |
氧(O2) |
≤2 |
≤0.5 |
≤0.5 |
≤0.2 |
|
氢(H2) |
≤1 |
- |
- |
- |
|
一氧化碳(CO) |
- |
≤1 |
≤0.5 |
≤0.1 |
|
二氧化碳(CO2) |
- |
≤1 |
≤0.5 |
≤0.1 |
|
水份 (H2O) |
≤4 |
≤0.5 |
≤0.5 |
≤0.2 |
|
总烃类THC |
≤2 |
≤0.3 |
≤0.2 |
≤0.1 |